Connection
Co-Authors
This is a "connection" page, showing publications co-authored by Michael Tanksalvala and Yunzhe Shao.
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0.207 |
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Esashi Y, Jenkins NW, Shao Y, Shaw JM, Park S, Murnane MM, Kapteyn HC, Tanksalvala M. Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging. Rev Sci Instrum. 2023 Dec 01; 94(12).
Score: 0.207