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Highly dispersed Co deposited on Al2O3 particles via CoCp2?+?H2 ALD.

Clary JM, Van Norman SA, Funke HH, Su D, Musgrave CB, Weimer AW. Highly dispersed Co deposited on Al2O3 particles via CoCp2?+?H2 ALD. Nanotechnology. 2020 Apr 24; 31(17):175703.

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